10.14489/td.2023.05.pp.026-033

2023, 05 May

DOI: 10.14489/td.2023.05.pp.026-033

Obraztsov D. V., Chernyshov V. N.
ACTIVE TECHNOLOGICAL CONTROL OF THE THICKNESS AND UNIFORMITY OF SPRAYING OF THIN FILMS
(pp. 26-33)

Abstract. A method is proposed for active technological control and management of the deposition of thin conductive films, which makes it possible to obtain films of a given and uniform thickness over its entire surface. In the control method, wire resistive witnesses are used as primary measuring transducers, which are installed in specified areas of the molecular flow of the sprayed substance. Wire resistive witnesses change resistance depending on the thickness of the film deposited on them. In the process of deposition, according to information from wire witnesses, the molecular flow from the evaporator in certain areas is blocked by electromechanical shutters, which ensures uniform thickness of the deposited film. Experimental verification of the developed method and the system implementing it showed a decrease in the spread of film thickness over the entire surface of the substrate from 7 to 2 % on average.

Keywords: active technological control, thin film deposition uniformity, resistive “witness”, molecular flow of a substance, electromechanical flap.

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D. V. Obraztsov, V. N. Chernyshov (Federal State Budgetary Educational Institution of Higher Education “Tambov State Technical University”, Tambov, Russia)

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1. Ivanov S. V., Karelin E. Yu. (2012). Analysis of technological processes for manufacturing integrated circuits and microelectromechanical systems. Proceedings of the International Symposium "Reliability and Quality", Vol. 2, pp. 208 – 210. [in Russian language]
2. Dragunov V. P., Ostertak D. I., Pel'menev K. G. (2018). Influence of MEMS design features on the electrical capacitance with regard to electrode thickness. Modern Problems of Telecommunications: Proceedings of the Russian Scientific and Technical Conference, pp. 622 – 629. [in Russian language]
3. Obraztsov D. V., Dutov M. N., Chernyshov V. N. (2021). Mathematical Modeling of the Synthesis of Island Catalysts for Monitoring and Controlling the Process of Their Formation on the Surface of the Electrolyte of Solid Oxide Fuel Cells. Proceedings-2021. 3rd International Conference on Control Systems, Mathematical Modeling, Automation and Energy Efficiency, SUMMA 2021: 3, pp. 774 – 777. DOI: 10.1109/SUMMA53307.2021.9632062. EDN LVTMVP.
4. Kochikov I. V., Lagutin Yu. S., Lagutina A. A. et al. (2020). Improving the accuracy of optical coatings sputtering control by using a nonlocal data analysis algorithm. Sibirskiy zhurnal industrial'noy matematiki, Vol. 23 82(2), pp. 93 – 105. [in Russian language]
5. Obraztsov D. V., Chernyshov V. N., Shelohvostov V. P. (2015). Method and system of active technological control of synthesis of nanoobjects. Nanoinzheneriya, (8), pp. 27 – 32. [in Russian language]
6. Obraztsov D. V., Chernyshov V. N., Shelohvostov V. P. (2016). Method of active technological control of electrophysical parameters of islet film catalysts during vacuum synthesis of nanoobjects. Vestnik TGTU, Vol. 22 (1), pp. 15 – 24. [in Russian language]

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DOI: 10.14489/td.2023.05.pp.026-033

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