Журнал Российского общества по неразрушающему контролю и технической диагностике
The journal of the Russian society for non-destructive testing and technical diagnostic
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13 | 08 | 2022
2022, 06 June

DOI: 10.14489/td.2022.06.pp.024-029

Kharlamov N. R., Kiryanova A. D., Larionov N. M., Karakeyan V. I., Ryabyshenkov A. S.
(pp. 24-29)

Abstract. The results of the assessment of the composition of emissions of pollutants during the process of epitaxy into the atmosphere are presented. Using the example of a typical model of the epitaxy process and instrumental measurements, it was found that in the air removed from the epitaxy and charge discharge installations, the lead content is at the level of 99 %. Based on the material balance, the total lead emission capacity and its gross values are determined for the current and expanded production scale. It is shown that with an increase in the volume of production, the size of the sanitary protection zone of the enterprise is subject to revision in the direction of increase.

Keywords: pollutants, material balance, source of atmospheric air pollution, epitaxy, gross emission, sanitary protection zone.

 N. R. Kharlamov, A. D. Kiryanova, N. M. Larionov, V. I. Karakeyan, A. S. Ryabyshenkov (National Research University “MIET”, Moscow, Zelenograd, Russia)

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